Safc Hitech Product Catalog

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High performance chemicals for advanced semiconductor applications

www.safchitech.com

Member of the Sigma-Aldrich Group

SAFC Hitech Changing the face of materials technology SAFC Hitech provides a unique chemistry service translating application understanding into performance materials. Through an integrated approach from research and development, process development and scale-up to commercial-scale manufacturing, we innovate and manufacture chemicals to enable your current and future technology needs.

Silicon semiconductor SAFC Hitech understands the rapidly changing needs of the silicon semiconductor industry and provides innovative chemistry, novel materials, commercial-scale manufacturing and supply chain expertise to enable current and future technologies. We offer an integrated long-term collaborative partnership approach to research, development and commercial manufacturing that makes innovation possible and offers customers continued support throughout the product’s life cycle. Key to our success is understanding customer-specific applications - enabling us to translate ideas into chemistry solutions that work for our customers’ process technologies.

Compound semiconductor SAFC Hitech leads the industry in chemical manufacture, purity and delivery performance. Our objective is to provide chemistry solutions of the appropriate grade and delivery configuration to match customer-specific device application requirements for the compound semiconductor industry. As premier providers of TMG, TMI, Solution TMI™, TMA, TEG, DMZ and DEZ chemistries, we pioneer innovations as well as provide a solid chemical supply network to minimize risk. Our broad-based capabilities and resources allow us to offer global manufacturing with the strong local infrastructure support our customers have come to depend upon to meet their daily manufacturing requirements.

www.safchitech.com

“Collaborative partnerships to make your ideas happen”

“A reliable and responsive partner”

“Enabling your current and future technology”

Member of the Sigma-Aldrich Group

Silicon Semiconductor

A LU M I N I U M Trimethylaluminium

CAS Number 75-24-1

Al(CH3)3 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density @ 20°C: V.P. Equation: Appearance:

72.09 127°C 15.4°C 0.752 g/ml Log10P(mmHg) = 8.220 - 2134/T(K) Colourless liquid

ORDERING INFORMATION

Code: Grades:

TMAL EG, AG, EpiPure™

Dimethylethylamine alane

CAS Number 124330-23-0

AlH3 . N(CH3)2(C2H5) VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point : Melting Point: Density @ 20°C: V.P. Equation: Appearance:

103.12 50-55°C @ 0.052 mmHg 5°C 0.780 g/ml Log10P(mmHg) = 10.70 - 3090/T(K) Colourless liquid with smell of amine

ORDERING INFORMATION

Code: Grades:

DMEA AG

Dimethylaluminium hydride

CAS Number 865-37-2

(CH3)2AlH VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density @ 20°C: V.P. Equation: Appearance:

58.1 154°C 17°C 0.750 g/ml Log10P(mmHg) = 8.920 - 2575/T(K) Viscous liquid

ORDERING INFORMATION

Code: Grades:

DMAH EG, AG

6

Diethylaluminium ethoxide

CAS Number 1586-92-1

(C2H5)2Al(OC2H5) VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density @ 20°C: V.P. Equation: Appearance:

130.17 108-109°C @ 10 mmHg 2.5-4.5°C 0.850 g/ml Log10P(mmHg) = 6.350 - 2054/T(K) Liquid

ORDERING INFORMATION

Code: Grades:

DEAL RE

ARSENIC Arsine

CAS Number 07784-42-1

AsH3 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Gas Density @ 15°C: V.P. Equation: Appearance:

77.95 -62.5°C -117°C 3.290 kg/m3 Log10P(mmHg) = 6.569 - 762.4/T(K) Colourless gas

ORDERING INFORMATION

Code: Grades:

ASH3 UHP, 6N

BA R I U M Bis(2,2,6,6-tetramethylheptane-3,5-dionato)barium

CAS Number 17594-47-7

[Ba(C11H19O2)2]4 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

2015.6 (tetramer) 225°C @ 0.05 mmHg (sub) 175-185°C N/A Log10P(mmHg) = 8.370 - 4710/T(K) White crystalline solid

ORDERING INFORMATION

Code: Grades:

BATHD EG

7

BISMUTH Tris(1-methoxy-2-methyl-2-propoxy)bismuth

CAS Number N/A

Bi(C5H11O2)3 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

518.48 N/A 70°C N/A Log10P(mmHg) = 8.251 - 2257/T(K) Pale yellow crystals

ORDERING INFORMATION

Code: Grades:

BIMMP3 RE

Tris(2,2,6,6-tetramethylheptane-3,5-dionato)bismuth

CAS Number 142617-53-6

Bi(C11H19O2)3 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

758.78 150°C @ 0.5 mmHg (sub) 112-116°C N/A Log10P(mmHg) = 10.27 - 5199/T(K) Off white solid

ORDERING INFORMATION

Code: Grades:

BITHD RE

8

BORON Boron trichloride

CAS Number 10294-34-5

BCl3 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Relative Density (gas): V.P. Equation: Appearance:

117.16 12.5°C -107°C 4 (air = 1) Log10P(mmHg) = 7.316 - 1266/T(K) Colourless gas

ORDERING INFORMATION

Code: Grades:

BCL3 3N, 5N

Boron trichloride dimethyloctylamine complex

CAS Number N/A

BCl3(CH3)2NC8H17 Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

274.47 N/A 25-28°C N/A N/A White to light brown waxy solid

ORDERING INFORMATION

Code: Grades:

BOAM HP (99.5%)

COPPER Bis(2,2,6,6-tetramethylheptane-3,5-dionato)copper

CAS Number 14040-05-2

Cu(C11H19O2)2 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

430.05 N/A 198°C (dec) N/A Log10P = 17.00 - 6510/T(K) Purple crystalline solid

ORDERING INFORMATION

Code: Grades:

CUTHDS EG

9

GERMANIUM Tetraethoxygermanium

CAS Number 14165-55-0

Ge(OC2H5)4 THERMOGRAVIMETRIC ANALYSIS

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

252.83 168°C -72°C 1.134 g/ml N/A Colourless liquid

ORDERING INFORMATION

Code: Grades:

GEET CG

Germane 10% in Hydrogen

CAS Number 782-65-0 & 1333-74-0

GeH4 in H2 VAPOUR PRESSURE CURVE

germane Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

hydrogen

76.63 2.02 -88.4°C -252.9°C N/A N/A N/A N/A Log10P(mmHg) = 7.015 - 758.3/T(K) N/A N/A

ORDERING INFORMATION

Code: Grades:

GEH UHP

Germanium tetrachloride

CAS Number 10038-98-9

GeCl4 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

214.39 82-84°C -49.5°C 1.880 g/ml Log10P(mmHg) = 7.325 - 1690/T(K) Colourless liquid

ORDERING INFORMATION

Code: Grades:

GECL EG

10

Tetramethoxygermanium

CAS Number 992-91-6

Ge(OCH3)4 THERMOGRAVIMETRIC ANALYSIS

Formula Weight: Boiling Point: Melting Point: Density @ 20°C: V.P. Equation: Appearance:

196.75 66-67°C @ 36 mmHg -18°C 1.330 g/ml N/A Colourless liquid

ORDERING INFORMATION

Code: Grades:

GEME EG

Tetrakis(dimethylamino)germanium

CAS Number N/A

Ge(N(CH3)2)4 THERMOGRAVIMETRIC ANALYSIS

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

248.73 203°C @ 2 mmHg 14°C N/A N/A Colourless liquid

ORDERING INFORMATION

Code: Grades:

GEDMA RE

11

HAFNIUM Tetrakis(tert-butoxy)hafnium

CAS Number 2172-02-3

Hf(OC(CH3)3)4 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

471.02 90°C @ 5 mmHg N/A 1.150 g/ml Log10P(mmHg) = 8.2277 - 2710.6/T(K) Colourless liquid

ORDERING INFORMATION

Code: Grades:

HFTBUT EG

Tetrakis(diethylamino)hafnium

CAS Number 19824-55-6

Hf(N(C2H5)2)4 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

467.1 130°C @ 0.01 mmHg N/A 1.220 g/ml Log10P(mmHg) = 7.3066 - 2896.1/T(K) Yellow liquid

ORDERING INFORMATION

Code: Grades:

HFDEA EG

Tetrakis(dimethylamino)hafnium

CAS Number 19782-68-4

[Hf(N(CH3)2)4]2 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

354.79 60°C @ 0.01 mmHg 26-29°C 1.400 g/ml Log10P(mmHg) = 9.9457 - 3270.8/T(K) Pale yellow solid

ORDERING INFORMATION

Code: Grades:

HFDMA EG

12

Tetrakis(ethylmethylamino)hafnium

CAS Number 352535-01-4

Hf(N(C2H5)(CH3))4 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density @ 25°C: V.P. Equation: Appearance:

410.98 79°C @ 0.1 mmHg N/A 1.324 g/ml Log10P(mmHg) = 9.447 - 3432.3/T(K) Pale yellow liquid

ORDERING INFORMATION

Code: Grades:

HFEMA EG

Tetrakis(1-methoxy-2-methyl-2-propoxy)hafnium

CAS 309915-48-8

Hf(C5H11O2)4 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

591.14 135°C @ 7.6 mmHg 15°C 1.400 g/ml Log10P(mmHg) = 3.1171 - 1464/T(K) Colourless low melting solid

ORDERING INFORMATION

Code: Grades:

HFMMP RE

Bis(tert-butoxy)bis(1-methoxy-2-methyl-2-propoxy)hafnium

CAS Number N/A

Hf(OC(CH3)3)2(C5H11O2)2 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

531.08 115°C @ 0.2 mm Hg 100-104°C N/A Log10P(mmHg) = 8.2865 - 3374.2/T(K) White solid at room temperature, also supplied in solution

ORDERING INFORMATION

Code: Grades:

HFTBMM RE

13

Hafnium tetrachloride

CAS Number 13499-05-3

HfCl4 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

320.30 320°C (sub) N/A N/A Log10P(mmHg) = 11.50 - 5103/T(K) White solid (powder)

ORDERING INFORMATION

Code: Grades:

HFCL4 EG

Bis(methyl-ȑ 5-cyclopentadienyl)dimethylhafnium

CAS Number N/A

(CH3C5H4)2Hf(CH3)2 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

366.86 80-120°C @ 0.3-0.5 mmHg 60°C 1.60 ± 0.01 g/ml Log10P(mmHg) = 8.0218 - 3072.1/T(K) White wax-like solid

ORDERING INFORMATION

Code: Grades:

(HfD-02) HFCMME EG

Bis(methyl-ȑ 5-cyclopentadienyl)methoxymethylhafnium

CAS Number N/A

(CH3C5H4)2Hf(OCH3)CH3 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

382.86 105°C @ 0.3-0.4 mmHg N/A 1.63 ± 0.01 g/ml Log10P(mmHg) = 6.4697 - 2555.9/T(K) Yellow liquid

ORDERING INFORMATION

Code: Grades:

(HfD-04) HFCMMM EG

14

LANTHANUM Tris(2,2,6,6-tetramethylheptane-3,5-dionato)lanthanum

CAS Number 14319-13-2

La(C11H19O2)3 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

688.8 210°C @ 0.2 mmHg (sub) 227-231°C N/A Log10P(mmHg) = 2.4732 - 1903/T(K) White crystalline solid

ORDERING INFORMATION

Code: Grades:

LATHD CG

Solution Tris(1-methoxy-2-methyl-2-propoxy)lanthanum tetraglyme adduct

CAS Number N/A

La(C5H11O2)3 in CH3O(C2H5O)4OCH3 & C10H22O5 THERMOGRAVIMETRIC ANALYSIS

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

N/A N/A N/A N/A N/A Saturated solution

ORDERING INFORMATION

Code: Grades:

LAMMP3 RE

LEAD Bis(2,2,6,6-tetramethylheptane-3,5-dionato)lead

CAS Number 21319-43-7

Pb(C11H19O2)2 THERMOGRAVIMETRIC ANALYSIS

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

573.8 140°C @ 0.02 mmHg (sub) 130°C N/A N/A White crystalline solid

ORDERING INFORMATION

Code: Grades:

PBTHD EG

15

NIOBIUM Pentakis(ethoxy)niobium

CAS Number 3236-82-6

Nb(OC2H5)5 THERMOGRAVIMETRIC ANALYSIS

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

318.21 140-142°C @ 0.1 mmHg 6°C 1.260 g/ml N/A Clear light yellow liquid

ORDERING INFORMATION

Code: Grades:

NBET4N EG

Pentakis(butoxy)niobium

CAS Number 51030-47-8

Nb(OC4H9)5 THERMOGRAVIMETRIC ANALYSIS

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

458.56 N/A N/A 1.120 g/ml N/A Light yellow liquid

ORDERING INFORMATION

Code: Grades:

NBNBUT RE

RUTHENIUM Bis(2,4-dimethylpentadienyl)ruthenium

CAS Number 85908-78-7

Ru((CH3)2C5H5)2 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

291.43 N/A 85°C N/A Log10P(mmHg) = 8.619 - 3502/T(K) Yellow solid

ORDERING INFORMATION

Code: Grades:

DMRU EG, AG, EpiPure™

16

Bis(isopropyl-ȑ 5-cyclopentadienyl)ruthenium

CAS Number N/A

Ru((CH(CH3)2)C5H4)2 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

315.45 115-135°C N/A N/A Log10P(mmHg) = 5.6004 - 2263.7/T(K) Yellow liquid

ORDERING INFORMATION

Code: Grades:

RUIPCP RE

Ruthenium carbonyl

CAS Number 15243-33-1

Ru3(CO)12 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

639.34 N/A 150°C N/A Log10P(mmHg) = 13.00 - 5490/T(K) Orange solid

ORDERING INFORMATION

Code: Grades:

RUCO RE

SCANDIUM Tris(2,2,6,6-tetramethylheptane-3,5-dionato)scandium

CAS Number 15492-49-6

Sc(C11H19O2)3 THERMOGRAVIMETRIC ANALYSIS

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

594.86 275°C (dec) 152-155°C N/A N/A White crystalline solid

ORDERING INFORMATION

Code: Grades:

SCTHD RE

17

SILICON Tris(dimethylamino)silane

CAS Number 15112-89-7

((CH3)2N)3SiH VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

161.37 145°C N/A 0.840 g/ml Log10P(mmHg) = 8.220 - 2210/T(K) Colourless liquid

ORDERING INFORMATION

Code: Grades:

SIDMAH CG

Tetrakis(dimethylamino)silane

CAS Number 1624-01-7

Si(N(CH3)2)4 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

204.45 196°C 16-18°C 0.880 g/ml Log10P(mmHg) = 7.037 - 1969.5/T(K) Colourless liquid

ORDERING INFORMATION

Code: Grades:

T4DMAS RE

Tetrakis(ethylmethylamino)silane

CAS Number 477284-75-6

Si(N(C2H5)(CH3))4 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

260.57 N/A N/A N/A Log10P(mmHg) = 8.890 - 3029/T(K) Colourless liquid

ORDERING INFORMATION

Code: Grades:

TEMASI RE

18

Silane

CAS Number 07803-62-5

SiH4 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Gas Density @ 15°C: V.P. Equation: Appearance:

32 -111°C -186°C 1.350 kg/m3 Log10P(mmHg) = 7.060 - 680.4/T(K) Colourless gas

ORDERING INFORMATION

Code: Grades:

SIL Semiconductor

Trisilane (Silcore®)

CAS Number 7783-26-8

Si3H8 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

92.35 52.9°C -117.4°C 0.743 g/ml Log10P(mmHg) = 7.434 - 1489/T(K) Colourless liquid

ORDERING INFORMATION

Code: Grades:

SILCO 4N

Silcore® is a registered trademark of ASM International NV

Dichlorosilane

CAS Number 4109-96-0

SiCl2H2 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Gas Density @ 15°C: V.P. Equation: Appearance:

101.01 8.3°C -122°C 4.270 kg/m3 Log10P(mmHg) = 7.599 - 1323/T(K) Gas

ORDERING INFORMATION

Code: Grades:

DCS HP

19

Trichlorosilane

CAS Number 10025-78-2

SiCl3H VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

135.45 32-34°C -127°C 1.341 g/ml Log10P(mmHg) = 7.465 - 1397/T(K) Low boiling liquid (colourless liquid)

ORDERING INFORMATION

Code: Grades:

TCS HP

Tetraethylorthosilicate

CAS Number 78-10-4

Si(OC2H5)4 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

208.37 167°C -77°C 0.940 g/ml Log10P(mmHg) = 8.742 - 2522/T(K) Colourless liquid

ORDERING INFORMATION

Code: Grades:

TEOS HP

Silicon tetrachloride

CAS Number 10026-04-7

SiCl4 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

169.89 58°C -70°C 1.483 g/ml Log10P(mmHg) = 7.620 - 1562/T(K) Colourless liquid

ORDERING INFORMATION

Code: Grades:

SICL4 HP

20

STRONTIUM Bis[pentakis(ethoxy)dimethylaminoethoxy)tantalum]strontium

CAS Number 220057-73-8

Sr(Ta(OC2H5)5(OC2H4N(CH3)2))2 THERMOGRAVIMETRIC ANALYSIS

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

1076.42 90-100°C @ 0.2 mmHg (dist) N/A 1.250 g/ml N/A Pale yellow liquid

ORDERING INFORMATION

Code: Grades:

STEDMA RE

Bis(2,2,6,6-tetramethylheptane-3,5-dionato)strontium

[Sr(C11H19O2)2]3 Sr(thd)2 unadducted Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

THERMOGRAVIMETRIC ANALYSIS

1362.48 230°C @ 0.7 mmHg (sub) 200°C N/A N/A White crystalline powder

ORDERING INFORMATION

Code: Grades:

CAS Number 36885-30-0

SRTHD EG

21

TA N TA LU M Pentakis(dimethylamino)tantalum

CAS Number 19824-59-0

Ta(NC2H6)5 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

401.35 150-180°C 90°C @ 0.8 mmHg (sub) 1.252 g/ml Log10P(mmHg) = 11.30 - 4125/T(K) Pale yellow solid

ORDERING INFORMATION

Code: Grades:

PDMAT EG, AG, EpiPure™

Pentakis(ethoxy)tantalum

CAS Number 6074-84-6

[Ta(OC2H5)5]2 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

406.25 140°C @ 0.1 mmHg 21°C 1.560 g/ml Log10P(mmHg) = 9.966 - 4288/T(K) Colourless or slightly yellow liquid

ORDERING INFORMATION

Code: Grades:

TAET EG, AG, EpiPure™

Pentakis(butoxy)tantalum

CAS Number 51094-78-1

Ta(OC4H9)5 THERMOGRAVIMETRIC ANALYSIS

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

546.52 118°C N/A 1.340 g/ml N/A Very pale yellow liquid

ORDERING INFORMATION

Code: Grades:

TANBUT RE

22

Tetraethoxy(dimethylaminoethoxy)tantalum

CAS Number 172901-22-3

Ta(OC2H5)4(OC2H4N(CH3)2) THERMOGRAVIMETRIC ANALYSIS

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

449.33 95°C @ 0.2 mmHg <0°C 1.400 g/ml N/A Pale yellow liquid

ORDERING INFORMATION

Code: Grades:

TATDMA CG

Tris(diethylamino)(tert-butylimido)tantalum

CAS Number 169896-41-7

Ta(N(C2H5)2)3NC(CH3)3 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

468.45 95°C @ 0.5 mmHg N/A 1.200 g/ml N/A Yellow, orange liquid

ORDERING INFORMATION

Code: Grades:

TBTDET CG

Tantalum pentachloride

CAS Number 7721-01-9

TaCl5 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

358.21 242°C 221°C 3.680 g/ml Log10P(mmHg) = 12.734 - 4890/T(K) White solid (powder)

ORDERING INFORMATION

Code: Grades:

TACL RE

23

T I TA N I U M Titanium tetrachloride

CAS Number 7550-45-0

TiCl4 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density @ 20°C: V.P. Equation: Appearance:

189.68 137°C -24°C 1.726 g/ml Log10P(mmHg) = 7.640 - 1947/T(K) Colourless liquid

ORDERING INFORMATION

Code: Grades:

TICL EG, AG

Tetrakis(diethylamino)titanium

CAS Number 4419-47-0

Ti(NC4H10)4 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

336.42 85-90°C @ 0.1 mmHg -28°C 0.930 g/ml Log10P(mmHg) = 13.67 – 5065/T(K) Dark red liquid

ORDERING INFORMATION

Code: Grades:

TDEAT EG

Tetrakis(dimethylamino)titanium

CAS Number 3275-24-9

Ti(NC2H6)4 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

224.24 50°C @ 0.5 mmHg -30°C 0.960 g/ml Log10P(mmHg) = 8.600 - 2850/T(K) Yellow liquid

ORDERING INFORMATION

Code: Grades:

TDMAT EG

24

Bis(isopropoxy)bis(2,2,6,6-tetramethylheptane-3,5-dionato)titanium

CAS Number 144665-26-9

Ti(OCH(CH3)2)2(C11H19O2)2 THERMOGRAVIMETRIC ANALYSIS

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

532.58 150°C @ 10-2 mmHg (sub) 170°C N/A N/A White crystalline powder

ORDERING INFORMATION

Code: Grades:

TI-2-2 CG

Tetrakis(tert-butoxy)titanium

CAS Number 3087-39-6

Ti(OC4H9)4 Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

340.34 160-165°C @ 15 mmHg 4°C 0.890 g/ml N/A Colourless liquid

ORDERING INFORMATION

Code: Grades:

TITBUT RE

Tetrakis(1-methoxy-2-methyl-2-propoxy)titanium

CAS Number N/A

Ti(C5H11O2)4 THERMOGRAVIMETRIC ANALYSIS

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

460.44 N/A N/A N/A N/A Yellow oil

ORDERING INFORMATION

Code: Grades:

TIMMP4 RE

25

Bis(isopropoxy)bis(1-methoxy-2-methyl-2-propoxy)titanium

CAS Number N/A

Ti(OC3H7)2(C5H11O2)2 THERMOGRAVIMETRIC ANALYSIS

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

372.4 N/A N/A N/A N/A White crystalline solid

ORDERING INFORMATION

Code: Grades:

TIIPMM RE

TUNGSTEN Tungsten hexafluoride

CAS Number 7783-82-6

WF6 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Gas Density: V.P. Equation: Appearance:

297.84 17°C 2.3°C 1.125 g/ml Log10P(mmHg) = 8.467 - 1612/T(K) Colourless gas

ORDERING INFORMATION

Code: Grades:

WF63N 6N

Tungsten hexacarbonyl

CAS Number 14040-11-0

W(CO)6 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

351.91 N/A 150°C 2.650 g/ml Log10P(mmHg) = 9.046 - 3145/T(K) White powder

ORDERING INFORMATION

Code: Grades:

WCO6 HP

26

YTTRIUM Tris(2,2,6,6-tetramethylheptane-3,5-dionato)yttrium

CAS Number 15632-39-0

Y(C11H19O2)3 THERMOGRAVIMETRIC ANALYSIS

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

638.71 290°C (del) 175°C N/A N/A White crystalline solid

ORDERING INFORMATION

Code: Grades:

YTHDSB EG

Tris(1-methoxy-2-methyl-2-propoxy)yttrium

CAS Number N/A

Y(C5H11O2)3 THERMOGRAVIMETRIC ANALYSIS

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

398.4 N/A N/A N/A N/A White solid

ORDERING INFORMATION

Code: Grades:

YMMP RE

27

ZIRCONIUM Tetrakis(dimethylamino)zirconium

CAS Number 19756-04-8

[Zr(N(CH3)2)4]2 THERMOGRAVIMETRIC ANALYSIS

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

535.16 N/A 57-60°C N/A N/A Pale yellow solid

ORDERING INFORMATION

Code: Grades:

ZRDMA CG

Tetrakis(2,2,6,6-tetramethylheptane-3,5-dionato)zirconium

CAS Number 18865-74-2

Zr(C11H19O2)4 THERMOGRAVIMETRIC ANALYSIS

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

824.29 180°C @ 0.1 mmHg (sub) 308°C N/A N/A White crystalline solid

ORDERING INFORMATION

Code: Grades:

ZRTHD EG

Tetrakis(tert-butoxy)zirconium

CAS Number 2081-12-1

Zr(OC4H9)4 THERMOGRAVIMETRIC ANALYSIS

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

383.74 81°C @ 3 mmHg 3°C 0.960 g/ml N/A Clear colourless liquid

ORDERING INFORMATION

Code: Grades:

ZRTBUT RE

28

Tris(isopropoxy)mono(2,2,6,6-tetramethylheptane-3,5-dionato)zirconium

CAS Number 204522-78-1

Zr2(OC3H7)6(C11H19O2)2 THERMOGRAVIMETRIC ANALYSIS

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

903.64 N/A 160-163°C N/A N/A White crystalline solid

ORDERING INFORMATION

Code: Grades:

ZRISTH CG

Tetrakis(ethylmethylamino)zirconium

CAS Number 175923-04-3

Zr((C2H5)(CH3)N)4 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

323.63 81°C @ 0.1 mmHg N/A 1.049 g/ml Log10P(mmHg) = 7.3218 - 2759.9/T(K) Yellow liquid

ORDERING INFORMATION

Code: Grades:

ZREMA EG

Tetrakis(diethylamino)zirconium

CAS Number 13801-49-5

Zr((C2H5)2N)4 THERMOGRAVIMETRIC ANALYSIS

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

379.73 112°C @ 0.1 mmHg N/A N/A N/A Yellow liquid

ORDERING INFORMATION

Code: Grades:

ZRDEA CG

29

Bis(tert-butoxy)bis(1-methoxy-2-methyl-2-propoxy)zirconium

CAS Number 413569-99-7

Zr(OC(CH3)3)2(C5H11O2)2 THERMOGRAVIMETRIC ANALYSIS

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

443.8 N/A 96-101°C N/A N/A White solid

ORDERING INFORMATION

Code: Grades:

ZRTBMM RE

Bis(methyl-ȑ 5-cyclopentadienyl)methoxymethylzirconium

CAS Number N/A

(CH3C5H4)2Zr(OCH3)CH3 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

295.5 110°C @ 0.5 mmHg N/A 1.27 ± 0.01 g/ml Log10P(mmHg) = 7.2474 - 2586.4/T(K) Colourless liquid

ORDERING INFORMATION

Code: Grades:

(ZrD-04) ZRCMMM EG

30

Compound Semiconductor

A LU M I N I U M Trimethylaluminium

CAS Number 75-24-1

Al(CH3)3 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density @ 20°C: V.P. Equation: Appearance:

72.09 127°C 15.4°C 0.752 g/ml Log10P(mmHg) = 8.220 - 2134/T(K) Colourless liquid

ORDERING INFORMATION

Code: Grades:

TMAL EG, AG, EpiPure™

Dimethylethylamine alane

CAS Number 124330-23-0

AlH3 . N(CH3)2(C2H5) VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point : Melting Point: Density @ 20°C: V.P. Equation: Appearance:

103.12 50-55°C @ 0.052 mmHg 5°C 0.780 g/ml Log10P(mmHg) = 10.70 - 3090/T(K) Colourless liquid with smell of amine

ORDERING INFORMATION

Code: Grades:

DMEA AG

Diethylaluminium ethoxide

CAS Number 1586-92-1

(C2H5)2Al(OC2H5) VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density @ 20°C: V.P. Equation: Appearance:

130.17 108-109°C @ 10 mmHg 2.5-4.5°C 0.850 g/ml Log10P(mmHg) = 6.350 - 2054/T(K) Liquid

ORDERING INFORMATION

Code: Grades:

DEAL RE

32

ANTIMONY Tris(dimethylamino)antimony

CAS Number 7289-92-1

Sb(N(CH3)2)3 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density @ 20°C: V.P. Equation: Appearance:

253.81 57°C @ 2 mmHg N/A 1.300 g/ml Log10P(mmHg) = 6.230 - 1734/T(K) Colourless, light sensitive liquid

ORDERING INFORMATION

Code: Grades:

AMSB EG, AG

Triethylantimony

CAS Number 617-85-6

Sb(C2H5)3 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density @ 20°C: V.P. Equation: Appearance:

208.94 159.5°C -29°C 1.324 g/ml Log10P(mmHg) = 7.900 - 2183/T(K) Colourless liquid

ORDERING INFORMATION

Code: Grades:

TESB EG, AG

Trimethylantimony

CAS Number 594-10-5

Sb(CH3)3 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density @ 20°C: V.P. Equation: Appearance:

166.85 80.6°C -87.6°C 1.528 g/ml Log10P(mmHg) = 7.730 - 1709/T(K) Colourless liquid

ORDERING INFORMATION

Code: Grades:

TMSB EG, AG

33

ARSENIC Tris(dimethylamino)arsine

CAS Number 6596-96-9

As(N(CH3)2)3 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Freezing Point: Density @ 23°C: V.P. Equation: Appearance:

207.19 55-57°C @ 10 mmHg -53°C 1.248 g/ml Log10P(mmHg) = 8.290 - 2391/T(K) Colourless liquid with strong smell of amine

ORDERING INFORMATION

Code: Grades:

AMAS EG

Arsine

CAS Number 07784-42-1

AsH3 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Gas Density @ 15°C: V.P. Equation: Appearance:

77.95 -62.5°C -117°C 3.290 kg/m3 Log10P(mmHg) = 6.569 - 762.4/T(K) Colourless gas

ORDERING INFORMATION

Code: Grades:

ASH3 UHP, 6N

BISMUTH Trimethylbismuth

CAS Number 593-91-9

Bi(CH3)3 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density @ 20°C: V.P. Equation: Appearance:

254.08 110°C -86°C 2.300 g/ml Log10P(mmHg) = 7.628 - 1816/T(K) Liquid

ORDERING INFORMATION

Code: Grades:

TMBI RE

34

BORON Triethylboron

CAS Number 97-94-9

B(C2H5)3 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

98.00 95°C N/A 0.6961 g/ml Log10P(mmHg) = 7.812-1814/T(K) Colourless liquid

ORDERING INFORMATION

Code: Grades:

ET3B RE

CADMIUM Dimethylcadmium

CAS Number 506-82-1

Cd(CH3)2 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density @ 20°C: V.P. Equation: Appearance:

142.9 105.5°C -4.5°C 1.985 g/ml Log10P(mmHg) = 7.760 - 1850/T(K) Colourless liquid

ORDERING INFORMATION

Code: Grades:

DMCD EG, AG

35

CARBON Carbon tetrabromide

CAS Number 558-13-4

CBr4 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density @ 20°C: V.P. Equation: Appearance:

331.6 190°C 88-90°C 3.420 g/ml Log10P(mmHg) = 7.780 - 2346/T(K) White solid

ORDERING INFORMATION

Code: Grades:

CBR4 EG, AG

Carbon tetrachloride

CAS Number 56-23-5

CCl4 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density @ 20°C: V.P. Equation: Appearance:

153.82 77°C -23°C 1.590 g/ml Log10P(mmHg) = 8.050 - 1807.5/T(K) Colourless liquid

ORDERING INFORMATION

Code: Grades:

CCL4 EG, AG

Carbon trichlorobromide

CAS Number 75-62-7

CCl3Br VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density @ 20°C: V.P. Equation: Appearance:

198.26 100-105°C -6°C 2.012 g/ml Log10P(mmHg) = 7.730 - 1832/T(K) Colourless liquid

ORDERING INFORMATION

Code: Grades:

BTCM RE

36

Solution Carbon tetrabromide

CAS Number 209-189-6 & 208-878-9

CBr4 in CH3(CH2)14CH3 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density @ 20°C: V.P. Equation: Appearance:

331.6 190°C 88-90°C 3.420 g/ml Log10P(mmHg) = 7.780 - 2346/T(K) Saturated colourless solution

ORDERING INFORMATION

Code: Grades:

CBRS EG, AG, EpiPure™

C H LO R I N E Tert-butylchloride

CAS Number 507-20-0

C(CH3)3Cl VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density @ 20°C: V.P. Equation: Appearance:

92.58 51°C -26°C 0.840 g/ml Log10P(mmHg) = 8.995 - 1916/T(K) Liquid

ORDERING INFORMATION

Code: Grades:

TBCL RE

37

GALLIUM Trimethylgallium

CAS Number 1445-79-0

Ga(CH3)3 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density @ 20°C: V.P. Equation: Appearance:

114.82 55.7°C -15.8°C 1.151 g/ml Log10P(mmHg) = 8.070 - 1703/T(K) Colourless liquid

ORDERING INFORMATION

Code: Grades:

TMGA EG, AG, EpiPure™

Triethylgallium

CAS Number 1115-99-7

Ga(C2H5)3 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density @ 15°C: V.P. Equation: Appearance:

156.91 143°C -82.3°C 1.060 g/ml Log10P(mmHg) = 8.080 - 2162/T(K) Colourless liquid

ORDERING INFORMATION

Code: Grades:

TEGA EG, AG, EpiPure™

38

INDIUM Trimethylindium

CAS Number 3385-78-2

In(CH3)3 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density @ 20°C: V.P. Equation: Appearance:

159.93 133.8°C 88.4°C 1.568 g/ml Log10P(mmHg) = 10.52 - 3014/T(K) White, crystalline solid

ORDERING INFORMATION

Code: Grades:

TMIN EG, AG, EpiPure™

Solution TMI™

CAS Number 3385-78-2 & 112-18-5

In(CH3)3 & (CH3)2NC12H25 Trimethylindium Formula Weight: Boiling Point: Melting Point: Density @ 20°C: V.P. Equation: Appearance:

VAPOUR PRESSURE CURVE

159.93 133.8°C 88.4°C 1.568 g/ml Log10P(mmHg) = 10.52 - 3014/T(K) White slurry

ORDERING INFORMATION

Code: Grades:

TMIS EG, AG, EpiPure™

IRON Bis(ȑ 5-cyclopentadienyl)iron

CAS Number 102-54-5

Fe(C5H5)2 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

185.85 249°C 171°C N/A Log10P(mmHg) = 10.27 - 3680/T(K) Red/orange solid

ORDERING INFORMATION

Code: Grades:

CPFE EG, AG

39

MAGNESIUM Bis(ȑ 5-cyclopentadienyl)magnesium

CAS Number 1284-72-6

Mg(C5H5)2 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

154.49 290°C 176°C N/A Log10P(mmHg) = 10.00 - 3372/T(K) White solid

ORDERING INFORMATION

Code: Grades:

CPMG EG, AG

Solution Bis(ȑ 5-cyclopentadienyl)magnesium

CAS Number 1284-72-6 & 111-01-3

Mg(C5H5)2 in C30H62 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

154.49 290°C 176°C N/A Log10P(mmHg) = 10.00 - 3372/T(K) White slurry

ORDERING INFORMATION

Code: Grades:

CPMS EG, AG

Bis(methyl-ȑ 5-cyclopentadienyl)magnesium

CAS Number 40672-08-0

Mg(CH3C5H4)2 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

182.55 56-60°C @ 0.3 mmHg 29°C N/A Log10P(mmHg) = 7.300 - 2358/T(K) White solid

ORDERING INFORMATION

Code: Grades:

CPMM EG, AG

40

MANGANESE Bis(methyl-ȑ 5-cyclopentadienyl)manganese

CAS Number N/A

Mn(CH3C5H4)2 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

213.2 N/A 63°C N/A Log10P(mmHg) = 9.000 - 3050/T(K) Orange/red solid

ORDERING INFORMATION

Code: Grades:

MECPMN RE

NITROGEN Tert-butylamine

CAS Number 75-64-9

(CH3)3CNH2 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density @ 20°C: V.P. Equation: Appearance:

73.04 45.2°C -67.5°C 0.700 g/ml Log10P(mmHg) = 10.06 - 2243/T(K) Colourless liquid with very unpleasant ammonia-like smell

ORDERING INFORMATION

Code: Grades:

TBAM AG

1,1-Dimethylhydrazine

CAS Number 57-14-7

(CH3)2NNH2 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density @ 20°C: V.P. Equation: Appearance:

60.10 62-64°C @ 753 mmHg -58°C 0.791 g/ml Log10P(mmHg) = 8.190 - 1780/T(K) Colourless liquid

ORDERING INFORMATION

Code: Grades:

DMHZ AG, EpiPure™

41

Tert-butylhydrazine

CAS Number N/A

(CH3)3CNHNH2 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

88.18 109°C N/A N/A Log10P(mmHg) = 2.5346 - 531.0/T(K) Colourless liquid

ORDERING INFORMATION

Code: Grades:

TBHZ RE

PHOSPHORUS Phosphine

CAS Number 7803-51-2

PH3 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Gas Density @ 15°C: V.P. Equation: Appearance:

34.0 -87°C -134°C 1.450 kg/m3 Log10P(mmHg) = 6.984 - 754.1/T(K) Gas

ORDERING INFORMATION

Code: Grades:

PH3 UHP

Tris(dimethylamino)phosphine

CAS Number 1608-26-0

P(N(CH3)2)3 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density @ 20°C: V.P. Equation: Appearance:

162.97 150°C -44°C 0.750 g/ml Log10P(mmHg) = 9.0326 - 2558/T(K) Colourless liquid with ammonia-like smell

ORDERING INFORMATION

Code: Grades:

AMPH EG

42

RUTHENIUM Bis(2,4-dimethylpentadienyl)ruthenium

CAS Number 85908-78-7

Ru((CH3)2C5H5)2 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

291.43 N/A 85°C N/A Log10P(mmHg) = 8.619 - 3502/T(K) Yellow solid

ORDERING INFORMATION

Code: Grades:

DMRU EG, AG, EpiPure™

Bis(isopropyl-ȑ 5-cyclopentadienyl)ruthenium

CAS Number N/A

Ru((CH(CH3)2)C5H4)2 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

315.45 115-135°C N/A N/A Log10P(mmHg) = 5.6004 - 2263.7/T(K) Yellow liquid

ORDERING INFORMATION

Code: Grades:

RUIPCP RE

43

SELENIUM Dimethylselenide

CAS Number 593-79-3

Se(CH3)2 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density @ 20°C: V.P. Equation: Appearance:

109.03 52.8°C N/A 1.4077 g/ml Log10P(mmHg) = 9.872 - 2224/T(K) Colourless liquid

ORDERING INFORMATION

Code: Grades:

DMSE EG

Ditert-butylselenide

CAS Number 34172-60-6

Se(C4H9)2 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

193.19 123°C N/A N/A Log10P(mmHg) = 7.870 - 2040/T(K) Pale yellow liquid

ORDERING INFORMATION

Code: Grades:

DTSE EG

SULPHUR Ditert-butylsulphide

CAS Number 107-47-1

S(C4H9)2 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density @ 20°C: V.P. Equation: Appearance:

146.29 147-151°C N/A 0.815 g/ml Log10P(mmHg) = 8.010 - 2152/T(K) Colourless liquid

ORDERING INFORMATION

Code: Grades:

DBSU RE

44

T E L LU R I U M Dimethyltelluride

CAS Number 593-80-6

Te(CH3)2 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

157.68 82°C -10°C 1.960 g/ml Log10P(mmHg) = 7.970 - 1865/T(K) Pale yellow liquid

ORDERING INFORMATION

Code: Grades:

DMTE EG

Diethyltelluride

CAS Number 627-54-3

Te(C2H5)2 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density @ 20°C: V.P. Equation: Appearance:

185.68 137°C N/A 1.599 g/ml Log10P(mmHg) = 7.990 - 2093/T(K) Amber liquid

ORDERING INFORMATION

Code: Grades:

DETE EG

Diisopropyltelluride

CAS Number 51112-72-2

Te(C3H7)2 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

213.77 49°C @ 14 mmHg N/A 1.365 g/ml Log10P(mmHg) = 8.290 - 2309/T(K) Light yellow to orange liquid

ORDERING INFORMATION

Code: Grades:

DIPT EG

45

TIN Tetramethyltin

CAS Number 594-27-4

Sn(CH3)4 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density @ 20°C: V.P. Equation: Appearance:

178.83 78°C -53°C 1.315 g/ml Log10P(mmHg) = 7.500 - 1620/T(K) Colourless liquid

ORDERING INFORMATION

Code: Grades:

TMSN EG

Tetraethyltin

CAS Number 597-64-8

Sn(C2H5)4 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density @ 20°C: V.P. Equation: Appearance:

234.94 181°C -112°C 1.187 g/ml Log10P(mmHg) = 8.900 - 2739/T(K) Colourless liquid

ORDERING INFORMATION

Code: Grades:

TESN EG

46

ZINC Diethylzinc

CAS Number 557-20-0

Zn(C2H5)2 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Freezing Point: Density @ 20°C: V.P. Equation: Appearance:

123.49 118°C -28°C 1.200 g/ml Log10P(mmHg) = 8.280 - 2109/T(K) Colourless liquid

ORDERING INFORMATION

Code: Grades:

DEZN EG, AG, EpiPure™

Dimethylzinc

CAS Number 544-97-8

Zn(CH3)2 VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density @ 10°C: V.P. Equation: Appearance:

95.44 46°C -42°C 1.386 g/ml Log10P(mmHg) = 7.800 - 1560/T(K) Colourless liquid

ORDERING INFORMATION

Code: Grades:

DMZN EG, AG, EpiPure™

Dimethylzinc triethylamine adduct

CAS Number 88029-05-4

Zn(CH3)2[N(C2H5)3] VAPOUR PRESSURE CURVE

Formula Weight: Boiling Point: Melting Point: Density: V.P. Equation: Appearance:

196.4 95°C N/A N/A Log10P(mmHg) = 8.270 - 1970/T(K) Colourless liquid

ORDERING INFORMATION

Code: Grades:

ZNAM AG

47

C O N T E N T S 18 VIIIA

1 IA

H 1.01

2

1 13 IIIA

2 IIA

3

4

11

12

Li Be 9.01 6.94

Na Mg 22.99 24.31

14 IVA

15 VA

16 VIA

5

6

7

8

9

10

13

14

15

16

17

18

35

36

53

54

85

86

B 12.01 C 14.01 N 16.00 O 10.81 3 IIIB

4 IVB

5 VB

6 VIB

7 VIIB

8 9 10 --------------VIIIB--------------

11 IB

12 IIB

He 4.00

17 VIIA

F Ne 19.00 20.17

Al 28.09 Si 30.97 P 32.07 S 35.45 Cl Ar 26.98 39.95

19

20

21

22

23

24

25

26

27

28

29

30

31

32

33

34

37

38

39

40

41

42

43

44

45

46

47

48

49

50

51

52

55

56

57

72

73

74

75

76

77

78

79

80

81

82

83

84

87

88

89

104

105

106

107

108

109

110

58

59

60

61

62

63

64

65

66

67

68

69

70

71

90

91

92

93

94

95

96

97

98

99

100

101

102

103

K Ca Sc Ti 50.94 V Cr Mn Fe Co Ni Cu Zn Ga Ge As Se Kr Br 58.69 63.55 65.39 69.72 72.59 74.92 78.96 79.90 83.80 58.47 55.85 54.94 52.00 47.88 44.96 39.10 40.08 Rb Sr Y 91.22 Zr Nb Mo Tc Ru Rh Pd Ag Cd In Sn Sb Te 101.07 102.91 106.40 107.87 112.40 114.80 118.70 121.80 127.60 98.91 95.94 92.91 88.91 85.47 87.62

I Xe 126.90 131.30

Cs Ba La Hf Ta W Re Os Ir Pt Au Hg Tl Pb Bi Po Rn At (209) (210) (222) 132.91 137.30 138.90 178.50 180.90 183.90 186.21 190.20 192.22 195.10 196.97 200.59 204.37 207.20 209.00 Fr Ra Ac Rf Db Sg Bh Hs Mt Ds (269) (266) (265) (262) (263) (262) (261) (227) (223) 226.03

Ce Pr Nd Pm Sm Eu Gd Tb Dy Ho Er Tm Yb Lu 140.12 140.91 144.24 (145) 150.40 151.96 157.25 158.93 162.50 164.93 167.26 168.93 173.04 174.96 Md No Lr Th Pa U Np Pu Am Cm Bk Cf Es Fm 232.04 231.04 238.03 237.05 (244) (243) (247) (247) (251) (254) (257) (258) (259) (260)

Silicon Semiconductor Trimethylaluminium ....................................................................................................6 Dimethylethylamine alane ..........................................................................................6 Dimethylaluminium hydride ......................................................................................6 Diethylaluminium ethoxide ........................................................................................7 Arsine..........................................................................................................................7 Bis(2,2,6,6-tetramethylheptane-3,5-dionato)barium ..................................................7 Tris(1-methoxy-2-methyl-2-propoxy)bismuth ............................................................8 Tris(2,2,6,6-tetramethylheptane-3,5-dionato)bismuth................................................8 Boron trichloride ........................................................................................................9 Boron trichloride dimethyloctylamine complex ........................................................9 Bis(2,2,6,6-tetramethylheptane-3,5-dionato)copper..................................................9 Tetraethoxygermanium ............................................................................................10 Germane 10% in Hydrogen ....................................................................................10 Germanium tetrachloride ........................................................................................10 Tetramethoxygermanium..........................................................................................11 Tetrakis(dimethylamino)germanium ........................................................................11 Tetrakis(tert-butoxy)hafnium ....................................................................................12 Tetrakis(diethylamino)hafnium ................................................................................12 Tetrakis(dimethylamino)hafnium ..............................................................................12 Tetrakis(ethylmethylamino)hafnium ........................................................................13 Tetrakis(1-methoxy-2-methyl-2-propoxy)hafnium ....................................................13

48

Bis(tert-butoxy)bis(1-methoxy-2-methyl-2-propoxy)hafnium ..................................13 Hafnium tetrachloride ..............................................................................................14 Bis(methyl-ȑ5-cyclopentadienyl)dimethylhafnium ..................................................14 Bis(methyl-ȑ5-cyclopentadienyl)methoxymethylhafnium ........................................14 Tris(2,2,6,6-tetramethylheptane-3,5-dionato)lanthanum ........................................15 Solution Tris(1-methoxy-2-methyl-2-propoxy)lanthanum tetraglyme adduct ........15 Bis(2,2,6,6-tetramethylheptane-3,5-dionato)lead ....................................................15 Pentakis(ethoxy)niobium..........................................................................................16 Pentakis(butoxy)niobium..........................................................................................16 Bis(2,4-dimethylpentadienyl)ruthenium ..................................................................16 Bis(isopropyl-ȑ5-cyclopentadienyl)ruthenium ........................................................17 Ruthenium carbonyl ................................................................................................17 Tris(2,2,6,6-tetramethylheptane-3,5-dionato)scandium ..........................................17 Tris(dimethylamino)silane ........................................................................................18 Tetrakis(dimethylamino)silane..................................................................................18 Tetrakis(ethylmethylamino)silane ............................................................................18 Silane ........................................................................................................................19 Trisilane (Silcore®) ..................................................................................................19 Dichlorosilane ..........................................................................................................19 Trichlorosilane ..........................................................................................................20 Tetraethylorthosilicate ..............................................................................................20 Silicon tetrachloride..................................................................................................20 Bis[pentakis(ethoxy)dimethylaminoethoxy)tantalum]strontium ..............................21 Bis(2,2,6,6-tetramethylheptane-3,5-dionato)strontium ............................................21 Pentakis(dimethylamino)tantalum............................................................................22 Pentakis(ethoxy)tantalum ........................................................................................22 Pentakis(butoxy)tantalum ........................................................................................22 Tetraethoxy(dimethylaminoethoxy)tantalum ............................................................23 Tris(diethylamino)(tert-butylimido)tantalum ............................................................23 Tantalum pentachloride............................................................................................23 Titanium tetrachloride ..............................................................................................24 Tetrakis(diethylamino)titanium ................................................................................24 Tetrakis(dimethylamino)titanium ..............................................................................24 Bis(isopropoxy)bis(2,2,6,6-tetramethylheptane-3,5-dionato)titanium ....................25 Tetrakis(tert-butoxy)titanium ....................................................................................25 Tetrakis(1-methoxy-2-methyl-2-propoxy)titanium ....................................................25 Bis(isopropoxy)bis(1-methoxy-2-methyl-2-propoxy)titanium ..................................26 Tungsten hexafluoride ..............................................................................................26 Tungsten hexacarbonyl ............................................................................................26 Tris(2,2,6,6-tetramethylheptane-3,5-dionato)yttrium................................................27 Tris(1-methoxy-2-methyl-2-propoxy)yttrium ............................................................27 Tetrakis(dimethylamino)zirconium ..........................................................................28 Tetrakis(2,2,6,6-tetramethylheptane-3,5-dionato)zirconium ....................................28 Tetrakis(tert-butoxy)zirconium ..................................................................................28 Tris(isopropoxy)mono(2,2,6,6-tetramethylheptane-3,5-dionato)zirconium ............29 Tetrakis(ethylmethylamino)zirconium ......................................................................29 Tetrakis(diethylamino)zirconium ..............................................................................29 Bis(tert-butoxy)bis(1-methoxy-2-methyl-2-propoxy)zirconium ................................30 Bis(methyl-ȑ5-cyclopentadienyl)methoxymethylzirconium ....................................30

49

Compound Semiconductor Trimethylaluminium ..................................................................................................32 Dimethylethylamine alane ........................................................................................32 Diethylaluminium ethoxide ......................................................................................32 Tris(dimethylamino)antimony ..................................................................................33 Triethylantimony ......................................................................................................33 Trimethylantimony ....................................................................................................33 Tris(dimethylamino)arsine ........................................................................................34 Arsine........................................................................................................................34 Trimethylbismuth ......................................................................................................34 Triethylboron ............................................................................................................35 Dimethylcadmium ....................................................................................................35 Carbon tetrabromide ................................................................................................36 Carbon tetrachloride ................................................................................................36 Carbon trichlorobromide..........................................................................................36 Solution Carbon tetrabromide ................................................................................37 Tert-butylchloride ......................................................................................................37 Trimethylgallium ......................................................................................................38 Triethylgallium ..........................................................................................................38 Trimethylindium ........................................................................................................39 Solution TMI™ ..........................................................................................................39 Bis(ȑ5-cyclopentadienyl)iron....................................................................................39 Bis(ȑ5-cyclopentadienyl)magnesium ......................................................................40 Solution Bis(ȑ5-cyclopentadienyl)magnesium ........................................................40 Bis(methyl-ȑ5-cyclopentadienyl)magnesium ..........................................................40 Bis(methyl-ȑ5-cyclopentadienyl)manganese ..........................................................41 Tert-butylamine ........................................................................................................41 1,1-Dimethylhydrazine..............................................................................................41 Tert-butylhydrazine ..................................................................................................42 Phosphine ................................................................................................................42 Tris(dimethylamino)phosphine ................................................................................42 Bis(2,4-dimethylpentadienyl)ruthenium ..................................................................43 Bis(isopropyl-ȑ5-cyclopentadienyl)ruthenium ........................................................43 Dimethylselenide ......................................................................................................44 Ditert-butylselenide ..................................................................................................44 Ditert-butylsulphide ..................................................................................................44 Dimethyltelluride ......................................................................................................45 Diethyltelluride ..........................................................................................................45 Diisopropyltelluride ..................................................................................................45 Tetramethyltin ..........................................................................................................46 Tetraethyltin ..............................................................................................................46 Diethylzinc ................................................................................................................47 Dimethylzinc ............................................................................................................47 Dimethylzinc triethylamine ......................................................................................47

50

This catalogue contains SAFC Hitech's current major products however it is not an exhaustive list of precursors that we can supply. Due to the nature of SAFC Hitech's business the product range is continuously evolving with new, improved chemicals emerging from our active research department. If you have a query about any precursor that does not appear in this catalogue, or wish to discuss our latest product range, then please contact your account manager, or email us at [email protected].

Key to grades SAFC Hitech offer a wide range of grades suited to the various customer application requirements. In general we will advise on which purity is best matched to the performance demanded by users, be it 99.99% for protective coatings to 99.9999% or better for highly specialised optoelectronic devices. Specifications are available for each standard quality level and we can also offer customer specific grades. Particular proprietary purification techniques have given rise to the named grades “Adduct grade” and “EpiPure™ grade”. Adduct grade uses methods pioneered at SAFC Hitech to give products free from metallic impurities whilst EpiPure™ grade builds on these processes to yield metal and oxygen free compounds to the most stringent specifications available.

AG

Adduct Grade

EG

Electronic Grade

RE

Research Grade

EpiPure™ EpiPure™ Grade CG

Chemical Grade

3-6N

99.9 – 99.9999%

4N

99.99%

5N

99.999%

6N

99.9999%

UHP

Ultra High Purity

HP

High Purity

SAFC International Sites Global email: [email protected] China Tel: +86 21 6446 1686 Fax: +86 21 6405 4343 Europe Tel: +46 (0) 8 5620 3330 Fax: +46 (0) 8 5716 2850 Japan Tel: +81 3 3432 7032 Fax: +81 3 3578 7827 Korea Tel: +82 31 764 4907 Fax: +82 31 764 4961 Singapore Tel: +65 6 483 3386 Fax: +65 6 483 2698 Taiwan Tel: +88 62 2509 1399 Fax: +88 62 2501 6279 United Kingdom Tel: +44 (0) 151 334 2774 Fax: +44 (0) 151 334 6422 United States Tel: 610 706 0606 Fax: 610 706 0888

02994-EPI-MK-7721 JUX 0067

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