Ei Electro Mech System
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Micro-electromechanical Systems
TECHNICAL SEMINAR 2004
MICRO-ELECTROMECHANICAL SYSTEMS A Technical paper Submitted by
Ajay Kumar Patra
ROLL:EI200117303
National Institute Of Science And Technology
Under the guidance of
Ms. Suchilipi Nepak National Institute of Science & Technology Palur Hills, Berhampur Ajay Kumar Patra
EI200117303
[1]
Micro-electromechanical Systems
TECHNICAL SEMINAR 2004
What is MEMS? A
process technology used to create tiny integrated devices or systems that combineNational mechanical andAnd Technology Institute Of Science electrical components. Have the ability to sense, control and actuate on the micro scale, and generate effects on the macro scale. Ajay Kumar Patra
EI200117303
[2]
Micro-electromechanical Systems
TECHNICAL SEMINAR 2004
Schematic diagram of MEMS
National Institute Of Science And Technology
Ajay Kumar Patra
EI200117303
[3]
Micro-electromechanical Systems
TECHNICAL SEMINAR 2004
MST(microsystems technology)
National Institute Of Science And Technology
Ajay Kumar Patra
EI200117303
[4]
Micro-electromechanical Systems
TECHNICAL SEMINAR 2004
Classification of MEMS •Sensor-device that measures information from a surrounding environment and provides an electrical output signal in National Institute Of Science And Technology response to the parameter it measured. •Transducer-device that transforms one form of signal or energy into another form. •Actuator-device that converts an electrical signal into an action Ajay Kumar Patra
EI200117303
[5]
Micro-electromechanical Systems
TECHNICAL SEMINAR 2004
MEMS Applications BioMEMS MOEMS RF
National Institute Of Science And Technology
MEMS
Ajay Kumar Patra
EI200117303
[6]
Micro-electromechanical Systems
TECHNICAL SEMINAR 2004
DENSO Micro-car
National Institute Of Science And Technology
Ajay Kumar Patra
EI200117303
[7]
Micro-electromechanical Systems
TECHNICAL SEMINAR 2004
Effect of miniaturization on surface and volume
National Institute Of Science And Technology
Ajay Kumar Patra
EI200117303
[8]
Micro-electromechanical Systems
MEMS Fabrication methods TECHNICAL SEMINAR 2004
Photolithography Bulk
micromachining
Surface
micromachining National Institute Of Science And Technology
High-aspect-ratio
micromachining
LIGA Laser micromachining Computer
aided design
MEMCAD Ajay Kumar Patra
EI200117303
[9]
Micro-electromechanical Systems
TECHNICAL SEMINAR 2004
MEMS Packaging
National Institute Of Science And Technology
Ajay Kumar Patra
EI200117303
[10]
Micro-electromechanical Systems
TECHNICAL SEMINAR 2004
MEMS Transducers
mechanical sensor actuator National Institute Of Science And Technology radiation sensor actuator thermal sensor actuator
Ajay Kumar Patra
EI200117303
[11]
Micro-electromechanical Systems
Mechanical Transducer TECHNICAL SEMINAR 2004
Mechanical sensor piezoresistive piezoelectric National Institute Of Science And Technology capacitive resonant Mechanical actuator electrostatic piezoelectric Ajay Kumar Patra
EI200117303
[12]
Micro-electromechanical Systems
TECHNICAL SEMINAR 2004
Radiation Transducer Radiation sensor photodiodes charge-coupled devices National Institute Of Science And Technology pyroelectric sensors Radiation actuator
Ajay Kumar Patra
EI200117303
[13]
Micro-electromechanical Systems
TECHNICAL SEMINAR 2004
Thermal Transducers Thermal sensors thermo-mechanical National Institute Of Science And Technology
thermo resistive thermocouples
Thermal actuators shape memory alloy actuation
Ajay Kumar Patra
EI200117303
[14]
Micro-electromechanical Systems
TECHNICAL SEMINAR 2004
Industry Challenges
•Access to foundries •Design, simulation and modeling National Institute Of Science And Technology
•Packaging and testing •Standardization •Education and training
Ajay Kumar Patra
EI200117303
[15]
Micro-electromechanical Systems
TECHNICAL SEMINAR 2004
CONCLUSION •Despite MEMS being an enabling technology, it is facing challenges in developing and manufacturing because of different set of National Institute Of Science And Technology capabilities and competencies to implement it. •For true commercialization of MEMS, foundries must overcome the critical technological bottlenecks.
Ajay Kumar Patra
EI200117303
[16]
TECHNICAL SEMINAR 2004
Micro-electromechanical Systems
THANK YOU
National Institute Of Science And Technology
Ajay Kumar Patra
EI200117303
[17]
TECHNICAL SEMINAR 2004
MICRO-ELECTROMECHANICAL SYSTEMS A Technical paper Submitted by
Ajay Kumar Patra
ROLL:EI200117303
National Institute Of Science And Technology
Under the guidance of
Ms. Suchilipi Nepak National Institute of Science & Technology Palur Hills, Berhampur Ajay Kumar Patra
EI200117303
[1]
Micro-electromechanical Systems
TECHNICAL SEMINAR 2004
What is MEMS? A
process technology used to create tiny integrated devices or systems that combineNational mechanical andAnd Technology Institute Of Science electrical components. Have the ability to sense, control and actuate on the micro scale, and generate effects on the macro scale. Ajay Kumar Patra
EI200117303
[2]
Micro-electromechanical Systems
TECHNICAL SEMINAR 2004
Schematic diagram of MEMS
National Institute Of Science And Technology
Ajay Kumar Patra
EI200117303
[3]
Micro-electromechanical Systems
TECHNICAL SEMINAR 2004
MST(microsystems technology)
National Institute Of Science And Technology
Ajay Kumar Patra
EI200117303
[4]
Micro-electromechanical Systems
TECHNICAL SEMINAR 2004
Classification of MEMS •Sensor-device that measures information from a surrounding environment and provides an electrical output signal in National Institute Of Science And Technology response to the parameter it measured. •Transducer-device that transforms one form of signal or energy into another form. •Actuator-device that converts an electrical signal into an action Ajay Kumar Patra
EI200117303
[5]
Micro-electromechanical Systems
TECHNICAL SEMINAR 2004
MEMS Applications BioMEMS MOEMS RF
National Institute Of Science And Technology
MEMS
Ajay Kumar Patra
EI200117303
[6]
Micro-electromechanical Systems
TECHNICAL SEMINAR 2004
DENSO Micro-car
National Institute Of Science And Technology
Ajay Kumar Patra
EI200117303
[7]
Micro-electromechanical Systems
TECHNICAL SEMINAR 2004
Effect of miniaturization on surface and volume
National Institute Of Science And Technology
Ajay Kumar Patra
EI200117303
[8]
Micro-electromechanical Systems
MEMS Fabrication methods TECHNICAL SEMINAR 2004
Photolithography Bulk
micromachining
Surface
micromachining National Institute Of Science And Technology
High-aspect-ratio
micromachining
LIGA Laser micromachining Computer
aided design
MEMCAD Ajay Kumar Patra
EI200117303
[9]
Micro-electromechanical Systems
TECHNICAL SEMINAR 2004
MEMS Packaging
National Institute Of Science And Technology
Ajay Kumar Patra
EI200117303
[10]
Micro-electromechanical Systems
TECHNICAL SEMINAR 2004
MEMS Transducers
mechanical sensor actuator National Institute Of Science And Technology radiation sensor actuator thermal sensor actuator
Ajay Kumar Patra
EI200117303
[11]
Micro-electromechanical Systems
Mechanical Transducer TECHNICAL SEMINAR 2004
Mechanical sensor piezoresistive piezoelectric National Institute Of Science And Technology capacitive resonant Mechanical actuator electrostatic piezoelectric Ajay Kumar Patra
EI200117303
[12]
Micro-electromechanical Systems
TECHNICAL SEMINAR 2004
Radiation Transducer Radiation sensor photodiodes charge-coupled devices National Institute Of Science And Technology pyroelectric sensors Radiation actuator
Ajay Kumar Patra
EI200117303
[13]
Micro-electromechanical Systems
TECHNICAL SEMINAR 2004
Thermal Transducers Thermal sensors thermo-mechanical National Institute Of Science And Technology
thermo resistive thermocouples
Thermal actuators shape memory alloy actuation
Ajay Kumar Patra
EI200117303
[14]
Micro-electromechanical Systems
TECHNICAL SEMINAR 2004
Industry Challenges
•Access to foundries •Design, simulation and modeling National Institute Of Science And Technology
•Packaging and testing •Standardization •Education and training
Ajay Kumar Patra
EI200117303
[15]
Micro-electromechanical Systems
TECHNICAL SEMINAR 2004
CONCLUSION •Despite MEMS being an enabling technology, it is facing challenges in developing and manufacturing because of different set of National Institute Of Science And Technology capabilities and competencies to implement it. •For true commercialization of MEMS, foundries must overcome the critical technological bottlenecks.
Ajay Kumar Patra
EI200117303
[16]
TECHNICAL SEMINAR 2004
Micro-electromechanical Systems
THANK YOU
National Institute Of Science And Technology
Ajay Kumar Patra
EI200117303
[17]
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