Ei Electro Mech System

Micro-electromechanical Systems

TECHNICAL SEMINAR 2004

MICRO-ELECTROMECHANICAL SYSTEMS A Technical paper Submitted by

Ajay Kumar Patra

ROLL:EI200117303

National Institute Of Science And Technology

Under the guidance of

Ms. Suchilipi Nepak National Institute of Science & Technology Palur Hills, Berhampur Ajay Kumar Patra

EI200117303

[1]

Micro-electromechanical Systems

TECHNICAL SEMINAR 2004

What is MEMS? A

process technology used to create tiny integrated devices or systems that combineNational mechanical andAnd Technology Institute Of Science electrical components. Have the ability to sense, control and actuate on the micro scale, and generate effects on the macro scale. Ajay Kumar Patra

EI200117303

[2]

Micro-electromechanical Systems

TECHNICAL SEMINAR 2004

Schematic diagram of MEMS

National Institute Of Science And Technology

Ajay Kumar Patra

EI200117303

[3]

Micro-electromechanical Systems

TECHNICAL SEMINAR 2004

MST(microsystems technology)

National Institute Of Science And Technology

Ajay Kumar Patra

EI200117303

[4]

Micro-electromechanical Systems

TECHNICAL SEMINAR 2004

Classification of MEMS •Sensor-device that measures information from a surrounding environment and provides an electrical output signal in National Institute Of Science And Technology response to the parameter it measured. •Transducer-device that transforms one form of signal or energy into another form. •Actuator-device that converts an electrical signal into an action Ajay Kumar Patra

EI200117303

[5]

Micro-electromechanical Systems

TECHNICAL SEMINAR 2004

MEMS Applications BioMEMS MOEMS RF

National Institute Of Science And Technology

MEMS

Ajay Kumar Patra

EI200117303

[6]

Micro-electromechanical Systems

TECHNICAL SEMINAR 2004

DENSO Micro-car

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Ajay Kumar Patra

EI200117303

[7]

Micro-electromechanical Systems

TECHNICAL SEMINAR 2004

Effect of miniaturization on surface and volume

National Institute Of Science And Technology

Ajay Kumar Patra

EI200117303

[8]

Micro-electromechanical Systems

MEMS Fabrication methods TECHNICAL SEMINAR 2004

Photolithography Bulk

micromachining

Surface

micromachining National Institute Of Science And Technology

High-aspect-ratio

micromachining

LIGA Laser micromachining Computer

aided design

MEMCAD Ajay Kumar Patra

EI200117303

[9]

Micro-electromechanical Systems

TECHNICAL SEMINAR 2004

MEMS Packaging

National Institute Of Science And Technology

Ajay Kumar Patra

EI200117303

[10]

Micro-electromechanical Systems

TECHNICAL SEMINAR 2004

MEMS Transducers 





mechanical sensor actuator National Institute Of Science And Technology radiation sensor actuator thermal sensor actuator

Ajay Kumar Patra

EI200117303

[11]

Micro-electromechanical Systems

Mechanical Transducer TECHNICAL SEMINAR 2004

Mechanical sensor piezoresistive piezoelectric National Institute Of Science And Technology capacitive resonant Mechanical actuator electrostatic piezoelectric Ajay Kumar Patra

EI200117303

[12]

Micro-electromechanical Systems

TECHNICAL SEMINAR 2004

Radiation Transducer Radiation sensor photodiodes charge-coupled devices National Institute Of Science And Technology pyroelectric sensors Radiation actuator

Ajay Kumar Patra

EI200117303

[13]

Micro-electromechanical Systems

TECHNICAL SEMINAR 2004

Thermal Transducers Thermal sensors thermo-mechanical National Institute Of Science And Technology

thermo resistive thermocouples

Thermal actuators shape memory alloy actuation

Ajay Kumar Patra

EI200117303

[14]

Micro-electromechanical Systems

TECHNICAL SEMINAR 2004

Industry Challenges

•Access to foundries •Design, simulation and modeling National Institute Of Science And Technology

•Packaging and testing •Standardization •Education and training

Ajay Kumar Patra

EI200117303

[15]

Micro-electromechanical Systems

TECHNICAL SEMINAR 2004

CONCLUSION •Despite MEMS being an enabling technology, it is facing challenges in developing and manufacturing because of different set of National Institute Of Science And Technology capabilities and competencies to implement it. •For true commercialization of MEMS, foundries must overcome the critical technological bottlenecks.

Ajay Kumar Patra

EI200117303

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TECHNICAL SEMINAR 2004

Micro-electromechanical Systems

THANK YOU

National Institute Of Science And Technology

Ajay Kumar Patra

EI200117303

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