Simplified CMOS Process
Amir M. Sodagar
K.N.Toosi University of Technology
1
Simplified CMOS Process
SiO2
Si wafer, p-substrate
SiO2
Si wafer, p-substrate Amir M. Sodagar
K.N.Toosi University of Technology
2
Simplified CMOS Process
SiO2
Si wafer, p-substrate
SiO2
Si wafer, p-substrate Amir M. Sodagar
K.N.Toosi University of Technology
3
Simplified CMOS Process
SiO2
N-Well
Si wafer, p-substrate
SiO2
N-Well
Si wafer, p-substrate Amir M. Sodagar
K.N.Toosi University of Technology
4
Simplified CMOS Process
SiO2
N-Well
Si wafer, p-substrate
SiO2
N-Well
Si wafer, p-substrate Amir M. Sodagar
K.N.Toosi University of Technology
5
Simplified CMOS Process
SiO2
N-Well
Si wafer, p-substrate
SiO2
N-Well
Si wafer, p-substrate Amir M. Sodagar
K.N.Toosi University of Technology
6
Simplified CMOS Process
SiO2
N-Well
Si wafer, p-substrate
SiO2
N-Well
Si wafer, p-substrate Amir M. Sodagar
K.N.Toosi University of Technology
7
Simplified CMOS Process
SiO2
N-Well
Si wafer, p-substrate
SiO2
N-Well
Si wafer, p-substrate Amir M. Sodagar
K.N.Toosi University of Technology
8
Simplified CMOS Process
SiO2
N-Well
Si wafer, p-substrate
SiO2
N-Well
Si wafer, p-substrate Amir M. Sodagar
K.N.Toosi University of Technology
9
Simplified CMOS Process
SiO2
n+
n+
N-Well
Si wafer, p-substrate
SiO2 n+
n+
N-Well
Si wafer, p-substrate Amir M. Sodagar
K.N.Toosi University of Technology
10
Simplified CMOS Process
SiO2
n+
n+
p+
p+
N-Well
Si wafer, p-substrate
SiO2 n+
n+
p+
p+
N-Well
Si wafer, p-substrate Amir M. Sodagar
K.N.Toosi University of Technology
11
Simplified CMOS Process
SiO2
n+
n+
p+
p+
N-Well
Si wafer, p-substrate
SiO2 n+
n+
p+
p+
N-Well
Si wafer, p-substrate Amir M. Sodagar
K.N.Toosi University of Technology
12
Simplified CMOS Process
SiO2
n+
n+
p+
p+
N-Well
Si wafer, p-substrate
SiO2 n+
n+
p+
p+
N-Well
Si wafer, p-substrate Amir M. Sodagar
K.N.Toosi University of Technology
13
Simplified CMOS Process
Metal SiO2
n+
n+
p+
p+
N-Well
Si wafer, p-substrate Metal SiO2 n+
n+
p+
p+
N-Well
Si wafer, p-substrate Amir M. Sodagar
K.N.Toosi University of Technology
14
Simplified CMOS Process
e rc u So
te a G
ce r u So
n ai r D
te a G
n ai r D
Metal SiO2
n+
n+
p+
p+
N-Well
Si wafer, p-substrate Metal SiO2 n+
n+
p+
p+
N-Well
Si wafer, p-substrate Amir M. Sodagar
K.N.Toosi University of Technology
15