54209-mt----micro Electromechanical Systems

NR

Code No: 54209/MT

M.Tech. – II Semester Regular Examinations, September, 2008 MICRO ELECTROMECHANICAL SYSTEMS (Embedded Systems) Time: 3hours

Max. Marks:60 Answer any FIVE questions All questions carry equal marks ---

1.

Draw the structure of canti leavers & fixed beams and explain about them. Explain the response of MEMs to various stimuli.

2.

Derive differential equations for deflection under different forces. Distinguish between fixed and moving electrodes.

3.a)

Define the terms: i) Stress ii) Strain iii) Beeding moment iv) Deflection curve. Explain how laplace transform is useful in field calculations.

b) 4.

Explain about two terminal MEMs with their structures. What are the applications of variable capacitor.

5.

Draw the MEM circuits & structures of 2-input AND, OR, NAND and NOR gates. Explain how flip flops be configured using MEMs.

6.

Explain MEM transduces for i) Pressure ii) Force and

iii) Temperature.

7.a) b)

Distinguish between thin and thick film technologies for MEMs. Explain about process flow and description of the processes.

8.

Write short notes on any two: a) Tunee terminal MEM structures b) Optical MEMs c) RF switches for modulation. $$$