Process Control Plan Module Etch
Product: Factory Location:
Operation
Operation
Responsible
Reference
Parameter
Meas.
Number
Name
Engineer
Document
Name
Units
© TLC, 2003
Definitions: Name of the operation process step or machine
Operation number or step
Reference document where process controls Primary Engineer are defined responsible for design and deployment of process controls for that operation
Units of the parameter Name of the parameter(s) being controlled Temp, time, width, etc.
© TLC, 2003
(X/Y)
Clear
Requires Eng.
Lines of
Machine
Functional
Type of
Specification
support for
Defense
Alarm Limits
CTQ*
Indicator
Limits?
for moves?
(types of control)
(X Only)
Machine alarms Machine controls, all products Recipe/machine control Technology control Machine controls, all products Recipe/machine control Technology control Machine alarms Machine controls, all products Recipe/machine control Technology control Machine controls Recipe/machine control Technology control
Engineering Type of indicator, product (Y) or process (X) *Critical to Quality. Link parameter to product performance. Answer "why are we controlling this parameter?"
Upper or
support is not required to disposition or move lots (Y/N) Specifications are clearly communicated to the floor for disposition of product (Y/N)
Lower alarm limits
Machine Alarms: operational limits within the machine can run Machine controls/all products: allows the floor to monitor and control performance across all units produced on each machine Recipe/Machine control: allows the floor to monitor recipes per machine to determine if additional adjustments are required for each recipe Technology control: allows the Engineer to monitor performance across all machines by technology or recipe
Date:
2/7/2003
Control
Active Control
Chart
Control
Rules*
Type*
Limits
(1-5)
Type X-bar R X-bar s Individuals Delta to target z UWMA
(n) OCAP
Upper or
OCAP
lower control limits
is defined and approved (Y/N)
Measurement
Sample
Sample
Process
Frequency
Size
Sigma
How Frequency of data collection.
Active Rules 1. One point beyond limits 2. 6 increasing or decreasing 3. 8 in a row above or below CL 4. 2 out of 3 beyond zone A 5. 4 out of 5 beyond zone B Specify if using only one sided criteria
many samples are taken per subgroup?
What is the baseline process standard deviation a typical high volume product.
Cpk
Current Cpk Use a high volume product with the tightest spec.
Variation 1 SME
One standard deviation of measurement error from a gage study
Measurement Reference
Control &
Database
Status
Standard
OCAP
(Y/N)
Date
Reference standard available (Y/N)
Notes:
Data Measurement control is used to monitor and control gage bias and repeatability
stored in database (Y/N)
10/14/2008 10/14/2008 Completed
Date to start activity Activity Started, Date to complete activity